학술논문
GaAs to Si Direct Wafer Bonding at T <= 220 degrees C in Ambient Air Via Nano-Bonding (TM) and Surface Energy Engineering (SEE)
Document Type
Journal
Author
Gurijala, Aashi R.; Chow, Amber A.; Khanna, Shaurya; Suresh, Nikhil C.; Penmatcha, Pranav, V; Jandhyala, Siddarth, V; Sahal, Mohammed; Peng, Wesley; Balasooriya, Thilina N.; Ram, Sukesh; Diaz, Timoteo; Bertram, Michelle; Cornejo, Christian E.; Kavanagh, Karen L.; Culbertson, Robert J.; Herbots, Nicole
Source
Subject
Language
English
ISSN
18769918