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Investigation of atomic layer deposition methods of Al2O3 on n-GaN

Document Type

Journal

Author

Tadmor, Liad; Vandenbroucke, Sofie S. T.; Treidel, Eldad Bahat; Brusaterra, Enrico; Plate, Paul; Volkmer, Nicole; Brunner, Frank; Detavernier, Christophe; Wurfl, Joachim; Hilt, Oliver

Source

JOURNAL OF APPLIED PHYSICS; FEB 28 2024, 135 8, p085701 9p.

Subject

Language

English

ISSN

10897550

Online Access

Full Text (AIP) Web of Science JCR 저널정보 Scopus Find it@PNU

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