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Active dopant characterization methodology for germanium

Document Type

Journal

Author

Clarysse, T; Eyben, P; Janssens, T; Hoflijk, I; Vanhaeren, D; Satta, A; Meuris, M; Vandervorst, W; Bogdanowicz, J; Raskin, G

Source

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B; JAN-FEB 2006, 24 1, p381-p389, 9p.

Subject

Language

English

ISSN

10711023

Online Access

Web of Science Scopus Find it@PNU

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