학술논문
Selective laser pyrolysis of metalorganics as a method of forming patterned thin-film superconductors
Document Type
Journal Article
Author
Source
Appl. Phys. Lett.; (United States); 53:14
Subject
Language
English
Abstract
Fine line superconductors of Y-Ba-Cu-O were formed on <100> SrTiO/sub 3/ by the completely nonvacuum techniques of metalorganic deposition and selective laser pyrolysis. Lines 35 ..mu..m wide were written, using an Ar laser, in metal neodecanoates prior to pyrolysis. Regions of the metalorganics not exposed to laser pyrolysis were developed away using a xylene wash. Complete pyrolysis of the metal neodecanoates and rapid thermal annealing produced lines having superconducting onsets above 90 K and zero resistance at 69 K.