학술논문

Integrating Deposition, Processing, and Characterization Equipment within the National Center for Photovoltaics
Document Type
Conference
Author
Source
Other Information: Presented at the 2005 DOE Solar Energy Technologies Program Review Meeting held November 7-10, 2005 in Denver, Colorado. Also included in the proceedings available on CD-ROM (DOE/GO-1020060-2245; NREL/CD-520-38577)
Subject
14 SOLAR ENERGY PHOTOVOLTAICS
SOLAR
CHARACTERIZATION EQUIPMENT
PV
NREL
Solar Energy - Photovoltaics
PHOTOVOLTAICS
Language
English
Abstract
The purpose of the process integration project of the National Center for Photovoltaics (NCPV) is to develop an infrastructure that will allow researchers to gain new knowledge that is difficult--if not impossible--to obtain with existing equipment. This difficulty is due, in part, to the state of our existing tool set, which lacks sufficient in-situ or real-time measurement capabilities, or lacks access to analytical tools where the sample remains in a controlled environment between deposition and processing or measurement. This new infrastructure will provide flexible and robust integration of deposition, processing (etching, annealing, etc.), and characterization tools via a standardized transfer interface such that samples move between tools in a controlled ambient. Ultimately, this synergistic effort between NREL staff, universities, and the photovoltaic (PV) industry--around an integrated tool base--will add to the PV knowledge base and help move many PV technologies forward.