학술논문
Degradation of oxide films due to radiation effects in exposure to plasmas in sputter deposition and backsputtering
Document Type
Journal Article
Author
Source
Proc. IEEE (Inst. Electr. Electron. Eng.)., v. 62, no. 9, pp. 1236- 1241; Other Information: Orig. Receipt Date: 30-JUN-75
Subject
Language
English