부산대학교 도서관

This paper reports a NEMS (Nano Electro Mechanical Syetems) tunable color filter based on subwavelength grating with high color uniformity and low drive voltage. We newly proposed a GVG (Ground-Voltage-Ground) type tunable color filter deployed with a parallel-plate actuator with three pairs of electrode to decrease a crosstalk of an electrostatic attraction force between each actuator. The proposed structure was fabricated using an SOI wafer. The color tuning using was demonstrated by applying the drive voltage of 6.7 V. The reflected light intensity was decreased by 34 % at 680 nm wavelength. The color uniformity was also obtained in the filter area by reducing the variation of the displacement on one-dimensional arrayed actuators.