부산대학교 도서관

In this work, well-aligned vertical ZnO nanorod (ZnO NRs) on p-type Si substrate was fabricated by a microwave-assisted hydrothermal reactor to study the coal mine methane (CMM) gas sensing properties. The XRD diffraction peaks and Raman spectra of the ZnO NRs confirmed the hexagonal wurtzite structure with strong preferential orientation along the c axis and well crystal quality. SEM analysis showed NRs with 100 nm average diameter and ~600 nm length. The variations of the sensor electrical resistance in the presence of CMM were investigated at different gas concentrations and various temperatures in the dark and under UV light. The selectivity and response time of the sensor to CMM gas were improved under UV irradiation. The optimal operating temperatures were 225 °C and 100 °C in dark and exposing UV-irradiation, respectively. Also the response of ZnO NRs sensor under UV excitation in humid condition was higher. The sensor was more selective to CMM than CO2. The sensor stability was considered by repeating CMM detection for 90 days.