학술논문
High-performance p-type V2 O3 films by spray pyrolysis for transparent conducting oxide applications
Document Type
Original Paper
Author
Source
Scientific Reports. 14(1)
Subject
Language
English
ISSN
2045-2322
Abstract
High-quality epitaxial p-type V2 O3 thin films have been synthesized by spray pyrolysis. The films exhibited excellent electrical performance, with measurable mobility and high carrier concentration. The conductivity of the films varied between 115 and 1079 Scm−1 while the optical transparency of the films ranged from 32 to 65% in the visible region. The observed limitations in thinner films’ mobility were attributed to the nanosized granular structure and the presence of two preferred growth orientations. The 60 nm thick V2 O3 film demonstrated a highly competitive transparency-conductivity figure of merit compared to the state-of-the-art.