학술논문

Advanced techniques in automated high-resolution scanning transmission electron microscopy
Document Type
article
Source
Nanotechnology. 35(1)
Subject
Physical Sciences
Engineering
Nanotechnology
Bioengineering
scanning transmission electron microscopy
automation
4D-STEM
Bayesian optimization
Nanoscience & Nanotechnology
Language
Abstract
Scanning transmission electron microscopy is a common tool used to study the atomic structure of materials. It is an inherently multimodal tool allowing for the simultaneous acquisition of multiple information channels. Despite its versatility, however, experimental workflows currently rely heavily on experienced human operators and can only acquire data from small regions of a sample at a time. Here, we demonstrate a flexible pipeline-based system for high-throughput acquisition of atomic-resolution structural data using an all-piezo sample stage applied to large-scale imaging of nanoparticles and multimodal data acquisition. The system is available as part of the user program of the Molecular Foundry at Lawrence Berkeley National Laboratory.