학술논문
ZnO functionalization of multiwalled carbon nanotubes for methane sensing at single parts per million concentration levels
Document Type
article
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Source
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 33(6)
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Language
Abstract
This paper presents a novel atomic layer deposition (ALD) based ZnO functionalization of surface pretreated multiwalled carbon nanotubes (MWCNTs) for highly sensitive methane chemoresistive sensors. The temperature optimization of the ALD process leads to enhanced ZnO nanoparticle functionalization and improvement in their crystalline quality as shown by energy dispersive x-ray and Raman spectroscopy. The behavior of ZnO-MWCNT sensors in presence of methane concentrations down to 2 ppm level has been compared with that of pristine MWCNTs demonstrating that ZnO functionalization is an essential factor behind the highly sensitive chemoresistive nature of the ZnO-MWCNT heterostructures. The sensor is currently being tested under a range of conditions that include potentially interfering gases and changes to relative humidity.