부산대학교 도서관

In this report, several fabrication techniques for the formation of various nanochannels (with SiO₂, Si, or Quartz) are introduced. Moreover, simple fabrication technique for generating SiO₂ nanochannels without nanolithography is presented. By using different nanochannels, the degree of stretching DNA molecule will be evaluated. Finally, we introduce a nanometer scale fluidic channel with electrodes on the sidewall of it, to detect and analyze single DNA molecule. The cross sectional shape of the nanotrench is V-groove, which was implemented by thermal oxidation. Electrodes were deposited through both sidewalls of nanotrench and the sealing of channel was done by covering thin polydimethiysiloxane (PDMS) polymer sheet.