부산대학교 도서관

A one-step fabrication of a photonic crystal (PC) with functional defects is demonstrated. Using multi-beamphase-controlled holographic lithography with a diffracting optical element, large area one dimensional (1D)and two dimensional (2D) PCs with periodic defects were fabricated. The uniform area is up to 2 mm2,and tens of defect channels have been introduced in the 1D and 2D PC structure. This technique givesrise to substantial reduction in the fabrication complexity and significant improvement in the spatialaccuracy of introducing functional defects in photonic crystals. This method can also be used to designand fabricate three dimensional (3D) PCs with periodic defects.