학술논문

Angle-sensitive Pixels Based on Subwavelength Compound Gratings
Document Type
Academic Journal
Source
Current Optics and Photonics. 2022-08 6(4):359-366
Subject
Angle sensitive pixels
Subwavelength compound grating
Surface profile
Language
Korean
ISSN
2508-7266
2508-7274
Abstract
In this paper, we present a new design for angle-sensitive pixels (ASPs). The proposed ASPs take advantage of subwavelength compound gratings to capture the light angle, which enables pixel size to reach the wavelength scale of 0.7 ㎛ × 0.7 ㎛. The subwavelength compound gratings are implemented by the wires of the readout circuit inherent to the standard complementary metal–oxide–semiconductor manufacturing process, thus avoiding additional off-chip optics or post-processing. This technique allows the use of two pixels for horizontal or vertical angle detection, and can determine the light’s angle in the range from −45° to +45°. The proposed sensor enables surface-profile reconstruction of microscale samples using a lensless imaging system.