부산대학교 도서관

Spectroscopic ellipsometry (SE) has become an important tool in scatterometry based nanostructure 3D profiling. In this paper, we propose a novel 3D nano object recognition method by use of phase sensitive scatterometry. We claims that only phase sensitive scatterometry can provide a reasonable 3D nano-object recognition capability since phase data gives much higher sensitive 3D information than amplitude data. To show the validity of this approach, first we generate various 0th order SE spectrum data (Ψ and Δ) which can be calculated through rigorous coupled-wave analysis (RCWA) algorithm and then we calculate correlation values between a reference spectrum and an object spectrum which is varied for several different object 3D shape.