학술논문
OLED 디스플레이 증착공정용 초정밀 자기부상 물류이송시스템 개발
Document Type
Academic Journal
Source
대한기계학회 논문집 A권. 2018-12 42(12):1111-1118
Subject
Language
Korean
ISSN
1226-4873
2288-5226
2288-5226
Abstract
분진과 수분에 취약한 OLED 증착공정에서는 고청정의 물류이송시스템 개발이 시급하다. 현재 사용 중인 롤러방식의 이송시스템은 분진발생과 마찰력과 같은 비선형적인 요인에 의해 정밀제어 구현이 어려운 것이 현실이다. 이를 극복하고자 본 연구에서는 자기부상기술을 활용한 물류이송시스템을 개발하였다. 특히, 안정적인 부상과 부상공극변동을 최소화하기 위한 부상제어기 설계와 해석에 대해 본 연구에서 자세히 소개하였다. 개발한 시스템의 실효성을 검증하기 위해 10-3 torr급 진공환경에서 저속주행과 고속주행 실험을 수행하였으며 매우 높은 제어정밀도가 유지되는 것을 확인하였다. 또한 장시간 신뢰성을 검증하기 위해 12시간 연속구동 실험을 수행하였으며 장기 운영에서도 제어성능이 유지되는 것을 확인하였다.
In an OLED display evaporation process, which is vulnerable to dust and moisture, the development of a high-accuracy transport system is vital. It is difficult to implement precise control of a conventionally used roller-based transport system owing to nonlinear factors such as friction and the generation large amounts of dust. To tackle this issue, we developed a transport system using magnetic levitation technology. In this paper, the design of the levitation controller is introduced. In particular, both the absolute stability of the designed feedback system and the relative stability are addressed. To verify the effectiveness of the developed system, low- and high-speed experiments were carried out under a vacuum environment. Moreover, to verify the long-term reliability of the designed system, 12-h continuous driving experiments were conducted.
In an OLED display evaporation process, which is vulnerable to dust and moisture, the development of a high-accuracy transport system is vital. It is difficult to implement precise control of a conventionally used roller-based transport system owing to nonlinear factors such as friction and the generation large amounts of dust. To tackle this issue, we developed a transport system using magnetic levitation technology. In this paper, the design of the levitation controller is introduced. In particular, both the absolute stability of the designed feedback system and the relative stability are addressed. To verify the effectiveness of the developed system, low- and high-speed experiments were carried out under a vacuum environment. Moreover, to verify the long-term reliability of the designed system, 12-h continuous driving experiments were conducted.