부산대학교 도서관

An apparatus for transferring semiconductor devices in a semiconductor device handler is provided which simplifies set up procedures when a species of device to be tested, and the associated change kit, is changed. A reference picker and three variable pickers are positioned within the framing structure of the handler, with the motion of the third variable picker synchronized relative to the motion of the first and second variable pickers. A plurality of sensors determine an initial position of the variable pickers, and then motion of the variable pickers is monitored by respective scanning heads and linear scales until a new setup position which corresponds to the new device species is attained. In this manner, the procedure and structure for varying position and pitch of the various pickers can be simplified, thus reducing processing time and cost.