학술논문
Method of forming an indium-containing transparent conductive oxide film, metal targets used in the method and photovoltaic devices utilizing said films
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Patent
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Abstract
A method of forming an indium-containing transparent conductive oxide by reactive sputtering a metal target containing indium in an oxygen containing atmosphere and then depositing the resulting indium oxide on a substrate. Metal targets used in the method and photovoltaic devices utilizing the transparent conductive oxides are also disclosed.