학술논문

초전도 자성체 / Nd : YAG Laser 를 이용한 자성금속막의 패턴 식각에 있어서 에너지 흡수층이 미치는 영향
The Effect of Energy - absorbing layers on Micro - patterning of Magnetic Metal Films using Nd:YAG Laser
Document Type
Article
Source
전기전자재료학회논문지(J. Korean Inst. Electr. Electron. Mater. Eng.) / Journal of the Korean Institute of Electrical and Electronic Material Engineers. Jun 01, 2000 13(6):538
Subject
Language
Korean
ISSN
1226-7945

Online Access