부산대학교 도서관

Lithium manganese oxide (LiMn2O4)cathode thin films were deposited on a Si substrate by radio frequency (RF) magnetron sputtering. The films were annealed with in the range 400 to 700 ℃ for 2 h in O2. Structure and surface morphology of the films were characterized by X-ray diffraction(XRD) and field emission scanning electron microscopy(FESEM). Element alanalysis was conducted by energy dispersive spectroscopy(EDS). The degree of crystallization in the films increases with annealing temperature. A phase transformation from the amorphous to the crystalline phase is apparent at around 600 ℃. Films annealed at 700 ℃ exhibit characteristic XRD peaks with predominant(111) orientation representing cubic spinel structure. The lattice parameter is 6.694 Å for the 700 ℃ annealed film. The grain size gradually increases with annealing temperature, as evident from the SEM images.