부산대학교 도서관

As an effective machining method for hard and brittle materials, ultrasonicassisted grinding (UAG) was employed to manufacture microstructures on SiC in this study. The kinematic characteristics of abrasive grains during machining were analyzed first. After that, the influence of machining parameters on the shape accuracy and surface quality was revealed experimentally. The results demonstrate that the feed rate and ultrasonic amplitude have significant effects on machining quality. The introduction of ultrasonic vibration can effectively reduce the grinding force and improve the surface finish quality. For the micro cylinder array, by selecting the ultrasonic amplitude rationally, the peak-to-valley (PV) value and surface roughness can be decreased by 15.8 % and 27.5 %. Furthermore, microcracks, dominated by lateral cracks and fractures were found on the sub-surface. Compared with conventional grinding, UAG can reduce the subsurface damage (SSD) depth and gain a more uniform distribution of damage regions along the machined surface.