부산대학교 도서관

This paper presents the design and simulation of Cantilever type RF-MEMS Capacitive shunt switch with meanders and perforations. The main objective of this paper is to reduce the pull-in voltage and increases isolation of the proposed switch. Electro-mechanics and Solid-mechanics are used to simulate the proposed switch by using COMSOL Multiphysics software. The capacitance, switching time, stress analysis are calculated and compare both theoretical and simulation results of the proposed switch. By varying diff erent beam thickness, materials, an air gap between the beam and signal line to calculate spring constant and pull-in voltage. The proposed switch having pull-in voltage is 1.371 V, the dielectric material Si 3 N 4 is to improve the capacitance analysis of the switch. The up and downstate capacitance is 7.073 fF, 1.259 pF. The RF performance is simulated by using Ansoft HFSS tool, the switch performs at low frequencies at 1–4 GHz range. The return (S 11 ) and insertion loss (S 12 ) of the proposed switch is − 30 dB, − 0.0516 dB and the switch having good isolation (S 21 ) is − 37.5 dB at 1.5 GHz frequency. The switch is suitable for radar and satellite communication applications.