부산대학교 도서관

A series of ZrN–Cu nano-composite films were deposited using the RF magnetron sputtering system. The microstructure, mechanical properties and tribological properties were investigated. The results showed that ZrN–Cu films were composed of face-centered cubice (fcc)-ZrN and face-centered cubic (fcc)-Cu. With the increase of Cu content, the hardness of ZrN–Cu composite film increased slowly first and then decreased rapidly. The maximum hardness value was 34.6 GPa at 16 at.% Cu. At room temperature, the coefficient of friction (Cof.) of ZrN–Cu films were lower than the ZrN film. When the content of Cu was lower than 39 at.%, the wear rate of ZrN–Cu films were lower than the ZrN film. When the temperature of tribological testing was between 200–700 ℃, the Cof. of ZrN–Cu films at 16 at.% Cu were lower than ZrN film, while the wear rates were higher than the ZrN film. In summary, the addition of Cu improved the hardness and tribological properties of the ZrN–Cu film at room temperature, and decreased the Cof. of the ZrN-Cu during 200–700 ℃.