학술논문
촉매를 사용한 ITO 나노입자 액상위험유해물질 센서의 전기적 특성 변화 고찰
Analysis of the Electrical Characteristic Changes of ITO Nanoparticle HNS Sensors Using a Catalyst
Analysis of the Electrical Characteristic Changes of ITO Nanoparticle HNS Sensors Using a Catalyst
Document Type
Article
Source
새물리, 73(10), pp.818-825 Oct, 2023
Subject
Language
한국어
ISSN
2289-0041
0374-4914
0374-4914
Abstract
ITO 나노 입자를 이용한 액상 위험유해물질 HNS (Hazard and Noxious Substance) 센서를 제작하고, 촉매 적용에 따른 센서의 전기적 특성 변화를 고찰하였다. PET 기판 위에 제작한 ITO 필름 (P-ITO)과 ITO 위에 20nm의 두께를 갖는 Au 층을 적용한 (Au-ITO) 센서를 제작하여 3.5% 염수 중에 200 ppm 농도로 희석시킨 에탄올, 메탄올, 이소프로필 알코올(IPA)를 노출시켜 센서 특성을 비교하였다. Au 층을 적용한 센서의 경우 (Au-ITO) 기존의 ITO 센서 (P-ITO)에 비해, 200 ppm 농도의 에탄올과 메탄올에서 각각 29%, 21% 센서의 응답이 커졌고 응답시간은 20배, 5배 증가하였다. 반면 IPA의 경우 응답은 −0.7% 감소하고, 응답시간도 2배 길어졌다. 이러한 응답 특성의 변화를 설명하기 위하여 ITO 필름의 온도에 따른 전기적 특성의 변화를 조사하고, 그 결과를 hopping 전도 모델을 적용하여 고찰하였다.
A liquid sensor for hazardous and noxious substances (HNS) was fabricated using ITO nanoparticles, and the electrical characteristic changes of the sensor with catalytic application were investigated. Two types of sensors were prepared: one with an ITO film on a polyethylene terephthalate (PET) substrate (ITO/PET sub.: P-ITO) and the other with an additional 20-nm thick Au layer on top of the ITO film (Au/ITO/PET sub.: Au-ITO). The sensors were then exposed to 200-ppm diluted concentrations of ethanol (EtOH), methanol (MeOH), and isopropyl alcohol (IPA) in 3.5% saline solution, and their characteristics were compared. Compared to the ITO sensor (P-ITO), the sensor with the Au layer (Au-ITO) exhibited a significantly higher response of 29% and 21% to 200-ppm concentrations of EtOH and MeOH, respectively. The response time had also increased by a factor of 20 and 5, respectively. However, the response for IPA decreased by 0.7%, and the response time doubled. The electrical characteristics of the ITO film at different temperatures were investigated to explain these changes in response characteristics, and the results were analyzed using a hopping conduction model.
A liquid sensor for hazardous and noxious substances (HNS) was fabricated using ITO nanoparticles, and the electrical characteristic changes of the sensor with catalytic application were investigated. Two types of sensors were prepared: one with an ITO film on a polyethylene terephthalate (PET) substrate (ITO/PET sub.: P-ITO) and the other with an additional 20-nm thick Au layer on top of the ITO film (Au/ITO/PET sub.: Au-ITO). The sensors were then exposed to 200-ppm diluted concentrations of ethanol (EtOH), methanol (MeOH), and isopropyl alcohol (IPA) in 3.5% saline solution, and their characteristics were compared. Compared to the ITO sensor (P-ITO), the sensor with the Au layer (Au-ITO) exhibited a significantly higher response of 29% and 21% to 200-ppm concentrations of EtOH and MeOH, respectively. The response time had also increased by a factor of 20 and 5, respectively. However, the response for IPA decreased by 0.7%, and the response time doubled. The electrical characteristics of the ITO film at different temperatures were investigated to explain these changes in response characteristics, and the results were analyzed using a hopping conduction model.