학술논문
Small-grain titanium nitride film with high work-function by plasma treatment / プラズマ後処理によって高い仕事関数を有する微結晶窒化チタン膜
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2015, :2875
Subject
Language
Japanese
ISSN
2436-7613