부산대학교 도서관

This paper describes the evaluation of machining performance for the developed micro multi-edged tool and a prototype of new cutting device by using it for plane machining. This tool is like a grinding stone and consists of micro pyramidal hillocks, which are about a few hundred nanometers tall and formed on the wet anisotropic etching in the silicon fabrication process. Though it is expected to machine aluminum alloy, glass and so on, there is a problem that is the requirement of surface contact between a material and the tool in plane machining. The developed prototype of cutting device is equipped with a new mechanism to solve this problem. In the plane machining of Al-Mg alloy by using this device, the cutting performance of micro multi-edged tool has been evaluated and it has become clear that the tool has the machining performance as well as superfinishing by using an grinding stone with superfine grains.