부산대학교 도서관

In the recent years fabrication in micronano-meter scale has become one of the most important and interesting fields in nano Engineering, Chemistry, Biology and Physics. In this paper, convex curved Al surfaces were fabricated by highly charged Ar6+ ion beam from 10GHz NANOGAN ION SOURCE. Ion beams of a constant fluence 800 qµC/cm2 and different energies 100keV, 200keV, 400keV and 500keV were applied for the current experiment. After fabrication, the convex surfaces were analyzed for surface profile by laser microscopy. Finally the material properties in micronano scale such as nanohardness, elasticity and other properties in irradiated samples were measured and discussed briefly.