학술논문
Preparation of oxide films and their direct patterning by a surface discharge technique / 沿面放電による酸化物薄膜の形成とダイレクトパターニング
Document Type
Journal Article
Author
Source
Preprints of Annual Meeting of The Ceramic Society of Japan Preprints of Fall Meeting of The Ceramic Society of Japan. 2010, :2
Subject
Language
Japanese
Abstract
Surface discharge technique has an advantage to keep the substrate to a low temperature and supply high energy directly only to the selective area. Therefore, this technique will be developed into a convenient tool for a direct patterning in a film formation in future. We fabricated the electrodes for surface discharge that generates high energy, and applied the technique to the preparation of oxide films.