학술논문
5p-B-2 Low temperature formation of silicon oxide layers by use of catalytic activity of Pt overlayer / 5p-B-2 白金の触媒作用を用いたシリコン酸化膜の低温成長法
Document Type
Journal Article
Author
Source
Meeting Abstracts of the Physical Society of Japan. 1997, :336
Subject
Language
Japanese
ISSN
2189-0803