학술논문
Ultra-precision Air-pin Sensor and its Dynamic characteristic research
Document Type
Journal Article
Author
Source
SICE Annual Conference Program and Abstracts. 2002, :475
Subject
Language
English
Abstract
Non-contact pneumatic measurement technique is an important method in the dimension measurements of machine parts. In the recent years, the authors have developed the new type of air-pin pneumatic-electronic sensor. In this paper, Ultra-precision Air-pin Sensor and Its Dynamic Characteristic have been studied. The air-pin pneumatic-electronic sensor with 10μm in the measurement range, and its measurement accuracy is better than 0.1μm, and its response time is less 10ms.