학술논문
Development of the Novel Fast Atom Beam Gun (Examination of Basic Structure and Ar emission Characteristics) / 新形高速原子ビームガンの開発
Document Type
Journal Article
Author
Source
The Proceedings of Mechanical Engineering Congress, Japan. 2018, :1110203
Subject
Language
Japanese
ISSN
2424-2667
Abstract
Surface activated bonding (SAB) is used in three-dimensional laminating technology for such as LSI chips. Ar fast atom beam (FAB) is used for SAB. However, there is a serious problem that the conventional FAB gun can be often used for only hundreds of minutes because abrasion powders are generated from the worn part due to Ar+ sputtering in the gun. Therefore, it is the purpose of this work to develop a new FAB gun to realize longer life. We developed the novel FAB gun applied with a magnetic field to control Ar+ motion and reduce the sputtering in the gun. Furthermore, the disposition of the carbon electrodes in the gun was changed. As a result, we succeeded in 3 times Ar emission efficiency due to applying the magnetic field. And we unconfirmed abrasion powder in the novel FAB gun after 5200 minutes irradiation experiments. As written above, the novel FAB gun was able to function as expected.