학술논문

1A1-1F-E8 シート形アクティブシャトル弁を用いた共振駆動形圧電マイクロポンプ / A Resonantly-Driven Piezoelectric Micropump Using a Sheet-Type Active Shuttle Valve
Document Type
Journal Article
Source
The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec). 2003, :10
Subject
Language
Japanese
ISSN
2424-3124

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