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In-situ observation of anisotropic silicon (110)-16×2 reconstruction / Si(110)-16×2構造生成に伴う面内異方性のその場観察

Document Type

Journal Article

Author

H. Asaoka; M. Yano; S. Yasuda; T. Terasawa; 保田諭; 寺澤知潮; 朝岡秀人; 矢野雅大

Source

Meeting Abstracts of the Physical Society of Japan. 2019, :2143

Subject

その場観察
半導体
結晶成長

Language

Japanese

ISSN

2189-0803

Online Access

Open Access (JSTAGE) Open Access (EBSCO) Find it@PNU

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