학술논문
Ga源にGaCl3又はGaClを用いるGa2O3 HVPE成長の熱力学解析 / Thermodynamic Study on HVPE of Ga2O3 Using GaCl3 or GaCl as a Ga Source
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2019, :4035
Subject
Language
Japanese
ISSN
2436-7613