학술논문
ZrHf-oxide formation by Oxidation of Zr/Hf stacks and crystalline phase control / 金属Zr/Hf構造の熱酸化によるZrHf酸化物の形成と結晶相制御
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2020, :1779
Subject
Language
Japanese
ISSN
2436-7613