학술논문
Improvement of property on MFIS structure by control of nano interface structure for HfO2 layer prepared via chemical solution deposition / 化学溶液法で作製した HfO2 薄膜のナノ界面制御による MFIS 構造の特性向上
Document Type
Journal Article
Author
Source
Preprints of Annual Meeting of The Ceramic Society of Japan Preprints of Fall Meeting of The Ceramic Society of Japan. 2006, :260
Subject
Language
Japanese