학술논문

22pPSA-19 Electronic states of a SiON unltrathin film epitaxially grown on an SiC(0001) surface / 22pPSA-19 SiC(0001)上にエピタキシャル成長したSiON超薄膜の電子状態(領域9ポスターセッション,領域9,表面・界面,結晶成長)
Document Type
Journal Article
Source
Meeting Abstracts of the Physical Society of Japan. 2007, :936
Subject
Language
Japanese
ISSN
2189-0803