학술논문
Evaluation of crystal structures and piezoelectric properties of epitaxial Pb(Zr,Ti)O3 thin films grown on Si substrates / Si基板上エピタキシャルPb(Zr,Ti)O3薄膜の結晶構造と圧電特性の評価
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2020, :1245
Subject
Language
Japanese
ISSN
2436-7613