학술논문
EFG成長したβ-Ga2O3結晶中の欠陥評価(1) - (201)基板上のエッチピット列に対応する転位 - / Evaluation of defects in EFG-grown β-Ga2O3 crystals (1) - Dislocations corresponding to arrays of etch pits on (201) substrates -
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2017, :3934
Subject
Language
Japanese
ISSN
2436-7613