학술논문

Measurement of polymer film thickness based on throretical calculation of Rh KαX-ray Compton scattering intensity / ロジウムKαX線のコンプトン散乱X線の理論強度を用いる樹脂薄膜の膜厚測定
Document Type
Journal Article
Source
分析化学 / BUNSEKI KAGAKU. 1994, 43(5):371
Subject
Rh KαX-ray Compton scattering
XRF analysis
fundamental parameter method
measurement of polymer film thickness
polymer film
theoretical calculation
Language
Japanese
ISSN
0525-1931
Abstract
Film thicknesses of several kinds of polymers such as polyester and polypropylene were determined by theoretical calculation of the Rh KαCompton scattering from each polymer. The intensities of Rayleigh and Compton scattered continuous and characteristic X-rays which comprise the Rh KαCompton scattering were calculated. As the reference standard, a polytetrafluoroethylene plate (thickness: 10mm) was used. All of the determined thicknesses are in good agreement with the reference values or those measured with a universal horizontal metroscope. The differences between these values were 01μm for the thickness range of 4260μm. This method of determining polymer film thickness has the following features. (1) Bulk reference standards can be used. (2)Different kinds of polymer films can also be determined using same analytical conditions. This thickness determination for polymer films may be used for magnetic tapes, optical magnetic disks, wrapping films, painted steels, etc.