학술논문
Investigation of monolithic integration of hybrid MOS optical phase shifter and photodetector / ハイブリッドMOS型光位相シフタと受光器のモノリシック集積の検証
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2021, :1133
Subject
Language
Japanese
ISSN
2436-7613