학술논문
The suppression of polycrystal formation by adding oxide gas in the OVPE-GaN growth / 酸化物ガス添加によるOVPE-GaN結晶成長における多結晶生成抑制
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2020, :3099
Subject
Language
Japanese
ISSN
2436-7613