부산대학교 도서관

This paper describes the way of applying an active magnetic levitation system to active vibration isolation system that controls a micro-vibration and the results of the evaluation experiments. The control system, based on H∞ control theory, was designed to be used for an augmented system in each degree of freedom for the independence. A control system features a combination of H∞ and PI control methods for control in the vertical system. The system was actually tested to ascertain its performance on non-contact levitation and micro-vibration control. It was confirmed that the H∞ controller is capable of effective non-contact steady levitation, as well as micro-vibration isolation. The experimental results by a test apparatus showed that the designed controller yielded a 90% in vibration cancellation and effective external force suppression.