학술논문
H-1-2 Real-Time Visualization of Replenishment Process of nm-Thick Lubricant Films Using Ellipsometric Microscopy / H-1-2 エリプソメトリー顕微鏡を用いたナノ厚さ潤滑膜の修復過程のリアルタイム可視化
Document Type
Journal Article
Author
Source
The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP. 2014, 1
Subject
Language
Japanese
ISSN
2424-3140
Abstract
Recovery or replenishment of lubricant holes caused by sliding is important for thin-film lubrication. However, due to the difficulty of measurement, the recovery process of molecularly thin lubricant films has not been fully clarified yet. In this report, we tried to observe the recovery process of monolayer thick films by using two-stage imaging ellipsometric microscope. Using the developed microscope, the recovery process of the monolayer films with different bonding ratio was investigated.