학술논문
Dioxide filled deep silicon-trenches for through-silicon via silicon island arrays / TSV Siアイランドの集積化に向けたDeep-Trenchへの酸化物埋め込み
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2015, :2829
Subject
Language
Japanese
ISSN
2436-7613