학술논문
Low temperature fabrication of In–Ga–Zn–O thin film transistor with anodic–Al2O3 / 陽極酸化アルミニウムのゲート絶縁膜応用によるIn–Ga–Zn–O薄膜トランジスタの低温作製
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2019, :3998
Subject
Language
Japanese
ISSN
2436-7613