학술논문

Investigation of the deposition conditions of Cat-CVD i-a-Si by applying Bayesian optimization and the evaluation of deposited films. / ベイズ最適化を適用したCat-CVD i-a-Siの堆積条件検討及び膜特性の評価
Document Type
Journal Article
Source
Proceedings of the Annual Meeting of the Japan Photovoltaic Society. 2023, :91
Subject
Language
Japanese
ISSN
2436-6498