학술논문
Annealing time dependence on void occupancy of directly-bonded InP/Si substrate (2) / 直接貼付InP/Si基板におけるボイド占有率のアニール時間依存性 (2)
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2018, :1139
Subject
Language
Japanese
ISSN
2436-7613