학술논문
Fabrication of GaN Thin Films by RF Magnetron Sputtering and The Pressure Dependence of Electrical Resistance / RFマグネトロンスパッタ法を用いたGaN薄膜の作製とその電気抵抗の圧力依存性の評価
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2020, :2093
Subject
Language
Japanese
ISSN
2436-7613