학술논문
RFマグネトロンスパッタ法を用いたGaN薄膜の作製と評価に関する研究 / Study on Fabrication and Evaluation of GaN thin films by RF Magnetron Sputtering
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2019, :3158
Subject
Language
Japanese
ISSN
2436-7613